This is our largest source that we offer. We designed this one for large process applications such as high rate deposition and high current assist.
23RF – 23 cm RF source
Our power supplies are CE certified.
IBEAM 706-1 series with DC bias, control and RFN operation
505311A – 1kW RF generator for source
504552D1 – Matching network for 23 cm flange mount source
504552D3 – Matching network for 23 cm internal mount source
505914D1 – Matching network controller and cable for 23 cm flange mount source
505914D3 – Matching network controller and cable for 23 cm internal mount source
505752A – IBEAM 703 cable kit with beam, RFN and RF cables
507178A – 2 x 2.75″ CF flanges internal mount
507226A – ISO 400 flange mount
spare parts and other items
Click on the different category headings to find out more. You can also change some of your preferences. Note that blocking some types of cookies may impact your experience on our websites and the services we are able to offer.
These cookies are strictly necessary to provide you with services available through our website and to use some of its features.
We provide you with a list of stored cookies on your computer in our domain so you can check what we stored. Due to security reasons we are not able to show or modify cookies from other domains. You can check these in your browser security settings.
These cookies collect information that is used either in aggregate form to help us understand how our website is being used or how effective our marketing campaigns are, or to help us customize our website and application for you in order to enhance your experience.
If you do not want that we track your visit to our site you can disable tracking in your browser here:
We also use different external services like Google Webfonts, Google Maps, and external Video providers. Since these providers may collect personal data like your IP address we allow you to block them here. Please be aware that this might heavily reduce the functionality and appearance of our site. Changes will take effect once you reload the page.
Google Webfont Settings:
Google Map Settings:
Google reCaptcha Settings:
Vimeo and Youtube video embeds:
The following cookies are also needed - You can choose if you want to allow them: