23cm RF Ion Beam Source | Ion Beam Systems

This is our largest source that we offer. We designed this one for large process applications such as high rate deposition and high current assist.

Source

23RF – 23 cm RF source

Grids

Power Supplies

Our power supplies are CE certified.

IBEAM 706-1 series with DC bias, control and RFN operation

505311A – 1kW RF generator for source

504552D1 – Matching network for 23 cm flange mount source

504552D3 – Matching network for 23 cm internal mount source

505914D1 – Matching network controller and cable for 23 cm flange mount source

505914D3 – Matching network controller and cable for 23 cm internal mount source

505752A – IBEAM 703 cable kit with beam, RFN and RF cables

Neutralizer

Interface Kits

Parts

23 cm home page