6cm RF Ion Beam Source | Ion Beam Systems

6 cm RF Ion Beam Source

This small ion source is well suited for small systems. It is ideal for etching or pre-cleaning your parts. It can also be used for assist applications or even a small deposition chamber.

Etch Away

Product and Components

Source

06RF – 6 cm RF source

Grids

Power Supplies

Our power supplies are CE certified.

IBEAM 703-1 series with RF power, DC bias, control and RFN operation

504552A1 – Matching network for 6 cm flange mount source

504552A2 – Matching network for 6 cm internal mount source

505914A1 – Matching network and controller for 6 cm flange mount source

505914A2 – Matching network and controller for 6 cm internal mount source

505752A – IBEAM 703 cable kit with beam, RFN and RF cables

IBOX-104 – adaptor for connections to an Ion Tech style configuration (legacy equipment)

Neutralizer

Interface Kits

Parts