6 cm RF Ion Beam Source

A round cylinder houses the ion beam source and multi aperture grid assembly produces the 6 cm ion beam.

Currently our smallest RF source, the 6cm can provide all the benefits of radio frequency ion source technology in a smaller and more compact form. With a maximum beam current of 200mA at 1500V, the 6cm source is ideal for research and smaller production systems. This source also finds a home in etch and ion beam figuring systems with its highly divergent or highly convergent grid options. The body of this source is not water-cooled, thus requiring only two feedthroughs — RF power and DC Bias/Gas. Designed around the flexibility of internal mounting, the 6 cm RF ion beam source is also capable of being mounted directly to a flange for process flexibility.

We can help you configure this source with the appropriate grids and interface kit. Just let us know what you need to achieve and we can help.

Etch Away

Product and Components

Source

06RF – 6 cm RF source

Grids

Power Supplies

Our power supplies are CE certified.

IBEAM 703-1 series with RF power, DC bias, control and RFN operation

504552A1 – Matching network for 6 cm flange mount source

504552A2 – Matching network for 6 cm internal mount source

505914A1 – Matching network and controller for 6 cm flange mount source

505914A2 – Matching network and controller for 6 cm internal mount source

505752A – IBEAM 703 cable kit with beam, RFN and RF cables

IBOX-104 – adaptor for connections to an Ion Tech style configuration (legacy equipment)

Neutralizer

Interface Kits

Parts

Questions?

Call 1-970-663-6988 Email [email protected]