Source Selection Guide – A quick selection guide for choosing the appropriate source.
Grid Styles – A quick selection guide for choosing the appropriate grid assembly.
IAD Selection Guide – A guide for choosing a source for ion assist applications.
Quick Selection Guide – Overview of the selection process.
These illustrations show approximate beam shape downstream from the source. Actual beam shape will vary with running conditions.
RF Source Care – discharge chamber.
RF Source Care – antenna.
RF Matching Network – tuning issues.