Learning Center

Ion Beam 101 – if you are new and just starting out with lots of questions.

Ion Beam Sputtering 101 – for an introduction to the physics and terminology.

Manuals for Plasma Process Group Equipment

Drawings for Plasma Process Group Hardware

Video Center – for training and help.


Introduction Guides and Process Help

Source Selection Guide – A quick selection guide for choosing the appropriate source.

Grid Styles – A quick selection guide for choosing the appropriate grid assembly.

IAD Selection Guide – A guide for choosing a source for ion assist applications.

Quick Selection Guide – Overview of the selection process.

Beam Information

These illustrations show approximate beam shape downstream from the source. Actual beam shape will vary with running conditions.

3 cm DC Source Beam Coverage

6 cm RF Source Beam Coverage

8 cm DC Source Beam Coverage

12 cm RF Source Beam Coverage

13 cm DC Source Beam Coverage

16 cm RF Source Beam Coverage

23 cm RF Source Beam Coverage

Linear RF Source Beam Coverage

Source Care and Other Tidbits

RF Source Care – discharge chamber.

RF Source Care – antenna.

RF Matching Network – tuning issues.

A 5-minute video that shows how to install an IBEAM 703.

A 3-minute video that shows normal RF source operation.

Ion Beam Solutions

Optical Coating System