Learning Center
Ion Beam 101 – if you are new and just starting out with lots of questions.
Ion Beam Sputtering 101 – for an introduction to the physics and terminology.
Manuals for Plasma Process Group Equipment
Drawings for Plasma Process Group Hardware
Video Center – for training and help.
Introduction Guides and Process Help
Source Selection Guide – A quick selection guide for choosing the appropriate source.
Grid Styles – A quick selection guide for choosing the appropriate grid assembly.
IAD Selection Guide – A guide for choosing a source for ion assist applications.
Quick Selection Guide – Overview of the selection process.
Beam Information
These illustrations show approximate beam shape downstream from the source. Actual beam shape will vary with running conditions.
Source Care and Other Tidbits
RF Source Care – discharge chamber.
RF Source Care – antenna.
RF Matching Network – tuning issues.
A 5-minute video that shows how to install an IBEAM 703.
A 3-minute video that shows normal RF source operation.
Questions? Contact Us
Call 1-970-663-6988 Email [email protected]