6×22 cm or 6×30 cm RF Ion Beam Source

We offer 2 sizes of RF linear sources.  The 6×22 cm source offers the advantages of molybdenum grids with either a divergent or convergent beam.  The 6×30 cm source can operate collimated graphite grids for a flat profile.


In-line Process

Product and Components

06X22RF – 6×22 cm RF source

06X30RF – 6×30 cm RF source