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The Techne is our thin film deposition tool that produces high quality optical coatings with layer control at the angstrom level using an ion beam sputtering process. Optics are loaded onto substrate holders attached to a planetary fixture on the system door. Recipes are programmed and run on the touch screen allowing this fully automated system the capability to deposit the most challenging optical designs.
High quality ion beam coatings – the simple way.
TECHNE Ion Beam Deposition System
Optical Monitor Specifications
Visit our Sister Company Plasma Optik if you are looking for a demonstration of IBS coatings or need help with your production needs.
The Techne can produce many different oxides such as SiO2, Ta2O5, Nb2O5, and TiO2. Thin films are produced using a physical vapor deposition method where an ion beam reactively sputters a target material in an oxygen background. The ion beam, sputter target and substrate fixture geometry have been optimized for high deposition rate and superior uniformity. Typical deposition rates are 2 to 5 Å/s depending upon the material, with uniformities of 0.5% or better.
| Weight | 1350 kg |
|---|---|
| Dimensions | 2210 × 2110 × 1400 mm |
| Source Configuration | Deposition – 16 cm RF ion beam source mounted to ISO 320 flange, Assist – 12 cm RF ion beam source mounted to ISO 320 flange, IBAD will use both sources |
| Neutralizer | Radio frequency neutralizer (RFN) mounted to a 6” CF flange with matching network for each source. |
| Power Supply | IBEAM 703 power supply package with cables and matching network and controller. The IBEAM 703 has all required power supplies in one 19” rack mount x 4U height chassis. These include beam, accelerator, RF power and RFN power supplies. |
| Planetary | Rotation speed of 0.3 revolutions per second (rps). Gearing is selected such that the substrate position will not be repeated for over 150 seconds at 0.3 rps. Easy to remove and install planets for preloading. Actual substrate mounting hardware tailored to end user requirements. |
| High speed fixture | Designed for single substrates up to 30 cm diameter. Rotation speed of 1000 revolutions per minute (rpm). |
| Material Selection | Two industry standard 35 cm (14”) diameter stainless steel backing plates attached to a turret that provides 2 axes of motion and water cooling. Target material up to 15 mm (0.5”) thick is selected by the end user. |
| System Chamber | Electro polished stainless steel, 500 liter internal volume. Walls are externally water cooled with built in water channels. Front access door is 700 mm (28”) diameter and the rear door is 620 mm (24.5”) diameter. |
| High Vacuum Pump | Cryo Torr 400 cryogenic high vacuum pump. 17000 l/sec pumping for water vapor, 6000 l/sec Air. ISO 400 style flange. |
| Mechanical pump | Edwards E2M80 w/fomblin, Leybold D65 w/hydrocarbon oil, Leybold D65 w/fomblin oil, Leybold LV80 C dry pump w/silencer |
| Controller | Touch screen interfaced with programmable logic controllers (PLCs), is used to control pumping, cooling, gas flow, target position, fixture operation, and ion beam source operation. The operator can program process templates and execute programmed recipes. Other features include alarm with message display for troubleshooting and data logging for process monitoring. |
| Other options | Optical monitor connections, Quartz crystal monitor |
| Accessories | Quartz lamp heater package, Shutter for target pre-clean, UPS power loss |
16 cm Grid Assembly, 3 Grid, Moly, 3 FP 104/72/40 cm, 065/035 Spacing, S 020...
