The specifics about the ion beam source are covered in this article. You can find additional information in our manuals.
Ion sources can be used for sputtering material or etch. The ion beam source works when a discharge, or plasma, is created inside the source. Ions inside the source are contained using a discharge chamber. The plasma is created using an RF antenna attached to a matching network and generator. The ion beam grids or grid assembly is connected to extract the ion beam and it functions to direct the beam towards the target or substrate.
The ion source is operated using our IBEAM power supply. This power supply has a beam module to control the ion energy (voltage) and dose (beam current). The accelerator module controls the ion trajectories. The RF module establishes the plasma and the RFN module connects to the neutralizer.
Posts
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2020-04-21 19:01:112021-04-23 20:38:02April 21 COVID Update
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2020-03-25 19:11:192021-04-23 20:38:10March 25 COVID Plan
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2020-03-18 14:28:162021-04-23 20:38:19April 2020 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2020-02-05 14:57:332021-04-23 20:39:05February 2020 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2020-01-06 14:55:242021-04-23 20:39:35January 2020 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2019-12-09 22:30:592021-04-23 20:39:17December 2019 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2019-11-04 20:38:072021-04-23 20:39:25November 2019 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2019-09-23 16:03:042021-04-23 20:39:48October 2019 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2019-07-31 19:39:232021-04-23 20:39:54August 2019 Newsletter
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
0
0
Brett Buchholtz
https://plasmaprocessg.wpengine.com/wp-content/uploads/2019/04/Logo-PPG-for-Web-440px-Header-3.png
Brett Buchholtz2019-07-03 14:33:352021-04-23 20:39:59July 2019 Newsletter