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16 cm Interface Kit, 16.5″ CF Flange Extension Mount
This kit includes feedthroughs necessary to interface a 16 cm ion beam source to a system as an extension mount. The interface kit consists of a 16.5″ CF style flange with extension shroud and high voltage cover. Additional feedthroughs include gas/electric (2.75″ CF), RF (2.75″ CF), and water (1″ o-ring). Source and matching network sold separately.
Additional information
| Weight | 15.855 kg |
|---|---|
| Dimensions | 406 × 457 × 457 mm |
| Material | Stainless Steel, Alumina, copper tubing, teflon |
| Includes | 16.5 CF flange (505103A), 2.75 inches DC Bias & Gas Feedthrough (505108A), 1 inches x 18 inches Water feedthrough (505256A), RF Feedthrough 2.75 inches CF flange x 8.75 inches L (505412A), leads, fasteners, RF covers |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
