Welcome to our learning center where you will find an assortment of useful information. If you are new to the world of ion beam, we recommend checking out the 101 series below.
-
Ion Beam 101
If you are new and just starting out with lots of questions
-
Ion Beam Sputtering 101
For an introduction to the physics and terminology.
Introduction Guides and Process Help
The Selection Guides below illustrate typical ion beam solutions. It is always best to chat with us if you are unsure about setting up and selecting a source. In the Process section, you will find some useful tech notes about a variety of subjects.
Selecting an ion beam source can be a fairly challenging endeavor. The process really starts with the size of the vacuum system for the ion beam source as they require good vacuum conditions for proper operation. For example, small vacuum systems (e.g. ISO100) with limited pumping capacity, a DC source (like a 3 cm) might be the only option. Medium pumping stations (e.g. ISO250 or ISO320) can operate a 6 cm and 12 cm sources, in addition to the smaller DC sources. Larger pumping capacity stations can generally operate all source sizes.
After a source size is selected, the next choice will be grid styles. Grid assemblies control the ion beam’s shape, or focus. If the desire is to keep the ion beam on a target to sputter material, then a convergent style grid would be appropriate. However, if the goal is to have the beam cover a large area, then a divergent style is recommended.
Another choice is to select what type of source/vacuum chamber interface is required. When a source is mounted directly to a removable flange, that interface is called a flange mount. If the source needs to be pointed differently than a flange mount configuration, sometimes an internal mount approach is better.
To help you with the process, we posted the selection guides below.
-
Source Selection Guide
A quick selection guide for choosing the appropriate source.
-
Quick Selection Guide
Overview of the selection process.
-
IAD Selection Guide
A guide for choosing a source for ion assist applications.
-
Grid Styles
A quick selection guide for choosing the appropriate grid assembly.
Brochures
Detailed source specifications and configurations are found in our brochures below. Ion beam sources require stable electronics for operation and our power supply brochures below provide more information.
-
06 cm RF Ion Beam Source
A spec sheet and brochure for the 6cm
-
12 cm RF Ion Beam Source
A spec sheet and brochure for the 12cm
-
16 cm RF Ion Beam Source
A spec sheet and brochure for the 16cm
-
23 cm RF Ion Beam Source
A spec sheet and brochure for the 23cm
-
Linear Ion Beam Source
A spec sheet and brochure for the 6x22cm and 6x30cm
-
RF Ion Beam Source Family
Spec sheets and brochures for the complete RF source product line.
We currently offer:
- 3 cm DC source
- 8 cm DC source
- 13 cm DC source
New brochures are on the way!
-
I-Beam Power Supplies for RF Ion Beam Sources
A brochure covering our RF power supply products.
- IBEAM 600 Series for DC Ion Beam Sources – new brochure coming soon.
- Video: How to install our IBEAM 703 power supply on legacy equipment
Plasma Process Group power supplies are CE certified and made in the USA.
Beam Information
Next, the Beam Information learning center is all about ion beam coverage.
First, the Run Data section will have actual operational data from our standard sources.
In addition, Beam Shapes section has coverage diagrams of various size sources with standard grid assemblies. These coverage diagrams are useful to examine how the ion beam shape is going to change downstream from the source.
Lastly, you can use the Beam Calculator section if you would like to see how the ion beam current density varies at different conditions. This web-based calculator is rather basic. If you would like, we can run simulations using our in-house beam calculator if there is something more detailed you need to examine. Just let us know!
These are typical run data obtained using our vacuum systems. Some variation in source performance is to be expected for different pumping stations.
-
06 cm RF Source
Typical run data for our 6cm RF ion beam source.
-
08 cm DC Source
Typical run data for our 8cm DC ion beam source.
-
12 cm RF Source
Typical run data for our 12cm RF ion beam source.
-
13 cm DC Source
Typical run data for our 13cm DC ion beam source.
-
16 cm RF Source
Typical run data for our 16cm RF ion beam source.
-
23 cm RF Ion Beam Source
A spec sheet and brochure for the 23cm
Use these diagrams to obtain a first approximation of the beam shape downstream. Use the Beam Calculator for a better approximation.
-
03 cm DC Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
06 cm RF Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
08 cm DC Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
12 cm RF Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
13 cm DC Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
16 cm RF Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
23 cm RF Source Beam Coverage
A diagram illustrating the beam shape downstream.
-
Linear RF Source Beam Coverage
A diagram illustrating the beam shape downstream.
Source Care
The Source Care section is all about taking care of the equipment. Proper maintenance and care of the ion beam source, its grids, and the RFN will promote longevity of your investment.
-
RF Matching Network
This article covers the basics for keeping the Matching Network working properly.
- A 6-minute video that shows how to install an IBEAM 703.
- A 3-minute video that shows normal RF source operation.
-
Arcing with Graphite Grids
How to minimize grid arcing with graphite grids.
-
Grid Cleaning Media Blast
Settings and equipment required to clean grids.
-
Grid Spacing Measurement
How to make a grid spacing measurement.
-
Collector Installation
Install a critical part for the RFN.
Process Ideas
Below are various papers on ion beam sputter desposition process.
Tech notes about ion beam assisted deposition (IBAD) and related items:
-
Assist Influence
on mirror coatings
-
Film Stress Modification
using assist beam
-
IBAD Coatings:
tracking uniformity changes
-
IBAD Coatings:
rate sensitivity for SiO2
-
IBAD Coatings:
assist influence on deposition plume
-
IBAD Coatings:
long duration QCM rate stability
-
Mitigate Deposition
rate drift in SiO2 IBD process
Manuals, Drawings, and Videos
Find these under Technical Support and Videos.
The World of Ion Beam Sources
Plasma Optik offers IBS optical coating services. We have a dual ion beam sputter coating system setup for many types of ion beam sputtered films.
Millennium Machining offers machining services if you need custom parts, tooling or other hardware for your vacuum system.