Our Linear ion beam sources are useful for in-line applications such as roll-to-roll or web coaters. The 6x30cm RF ion beam source can be equipped with either 6x30cm collimated graphite grids or 6x22cm shaped molybdenum grids, allowing greater process flexibility with a single ion source. Additionally, the gas, RF antenna cooling water, and DC connections have been placed on the side of the ion source instead of the rear giving the ion source more placement flexibility inside the chamber. We also offer a standard 6x22cm ion source with most of the same benefits but constrained to 6x22cm molybdenum grids. As with all RF ion sources, these can be run with both inert and reactive gases allowing a huge range of processes. With a maximum of 500mA and 1500V, these linear ion beam sources can handle both high-rate, high-throughput and precision assist or etch operations.
RF Linear Ion Beam Sources

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In-Line Process
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6×22 cm grid assembly, 3 grid, moly, 25 cm FP, convergent
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6×22 cm Grid Assembly, 3 Grid, Moly, 25 cm FP, Divergent
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6×22 cm Moly 3 Grid Convergent Assembly with PPG M Linear Mount Hardware
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6×22 cm Moly 3 Grid Convergent Assembly with PPG S Linear Mount Hardware
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6×22 cm Moly 3 Grid Divergent Assembly with PPG M Linear Mount Hardware
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6×22 cm moly 3 grid divergent assembly with PPG S linear mount hardware
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6×30 cm Graphite 2 Grid Assembly with PPG M Linear Mount Hardware
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6×30 cm Grid Assembly, 2 Grid, Graphite, Divergent
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6×30 cm Grid Assembly, 2 Grid, Pyrolytic Graphite, 031 Spacing
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6×30 cm Grid Assembly, 2 Grid, Pyrolytic Graphite, Collimated
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6×30 Grid Assembly, 2 Grid, 031 Spacing, with Grid Mount Hardware
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6×30 Grid Assembly, 2 Grid, Collimated, with Grid Mount Hardware
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6×30 Grid Mount Hardware: Retainer, Mount Plate and Hardware
$3,285.00 -
Alignment Jig, 6×22 cm Grids, Lexan
$330.00
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I-BEAM RFS/RFN 600mA/1500V Beam
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I-BEAM RFS/RFN 600mA/1500V BEAM and IBOX 104
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I-BEAM RFS/RFN 800mA/1500V Beam
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I-BEAM RFS/RFN 800mA/1500V BEAM and IBOX 104
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Auto controller for matching network, with cable
$2,100.00 -
Matching Network and Controller for Linear RF Source INTERNAL MOUNT
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Matching Network for Linear cm RF Ion Source INTERNAL MOUNT
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Cable Kit for IBEAM 703, Includes: 2 RF Coaxial, 1 RFN 5 Wire, 1 Source 4 Wire, 18-Foot Cables, and 6-Foot PTII Controller Cable
$2,075.00 -
Cable, 4 Wire HV type, IBEAM to RF Source, 18 ft
$810.00 -
Cable, 5 Wire HV Type, IBEAM to RFN Match, 18 ft
$600.00 -
Cable, RF Power N-N Type, IBEAM to RFN Match, 18 ft
$465.00
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RFN Assembly
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RFN Flange with Match Network ITI Style, 2.75 inch, CF
$4,985.00 -
RFN Flange with Match Network ITI Style, 4.5 inch, CF
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RFN Flange with Match Network ITI style, 6 inch, CF
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Refurbish Customer Supplied RFN
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I-Beam RFN Power Supply for Stand Alone RFN
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Gas Isolator Assembly RFN
$1,075.00 -
RFN Alumina Backplate
$374.00 -
RFN Discharge Chamber
$863.00 -
RFN Keeper
$85.00 -
RFN, Antenna Lead Assembly
$710.00 -
RFN, Collector Lead Assembly
$490.00 -
RFN, Keeper Lead Assembly
$490.00 -
Spare Part Set – RFN Assembly
$930.00
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ELECTRIC LEAD, BEAM, 18 inch, Shielded, #12 D Female to Lug
$355.00 -
FEEDTHROUGH, DC Bias & Gas, 2.75″ CF, 18L
$1,500.00 -
FEEDTHROUGH, RF, 2.75″ CF, 18″ L
$2,130.00 -
Gas Isolator Assembly, Inlet 1.0 inch Bushing w/Swagelok, Outlet 1.0 inch w/Swagelok Nut
$1,075.00 -
RF Antenna Insulator
$259.00 -
Spare Part Set – 6×22 cm Grid Assembly
$930.00 -
Spare Part Set – 6×30 cm Grid Assembly
$930.00