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Part No. 06x22RF Category: Tags: ,

6 x 22 cm RF Ion Beam Source

Our Linear ion beam sources are useful for in-line applications such as roll-to-roll or web coaters. The 6x30cm RF ion beam source can be equipped with either 6x30cm collimated graphite grids or 6x22cm shaped molybdenum grids, allowing greater process flexibility with a single ion source. Additionally, the gas, RF antenna cooling water, and DC connections have been placed on the side of the ion source instead of the rear giving the ion source more placement flexibility inside the chamber. We also offers a standard 6x22cm linear ion source with most of the same benefits, but constrained to 6x22cm molybdenum grids.

As with all RF ion sources, these can be run with both inert and reactive gases allowing a huge range of processes. With a maximum of 500mA and 1500V, these linear ion sources can handle both high-rate, high-throughput and precision assist or etch operations.

Additional information

Beam Current

50-500 mA

Beam Voltage

50-1500 eV

Grid Materials

Molybdenum

Water Cooling

Antenna only at 6 l/min

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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