The 23 cm RF ion beam source is our largest one that we currently offer. We designed this one for large process applications such as high rate deposition and high current assist. This source can deliver over 1000mA of ion beam current with energies up to 1250eV. Its optimized shroud makes it ideal for applications that require a minimal footprint like ion assisted deposition tools.
Molybdenum grids are available for this ion source in a couple of configurations. The 23 cm RF ion beam source is typically internal-mounted, but flange mounting is available. Every ion beam installation is unique so we are ready to help meet the requirements of your specific application.