This mid sized 12cm RF ion beam source is well suited for small systems. It is a versatile source that offers solutions ranging from pre-cleaning through sputter deposition. This source will convert an evaporative system into an ion assisted deposition machine thereby creating higher quality coatings.
12 cm RF Ion Beam Source
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Versatile
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12 cm Grid Assembly, 3 Grid, Moly, 130 cm FP, Convergent
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12 cm Grid Assembly, 3 Grid, Moly, 130 cm FP, Convergent, with Mount Hardware
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12 cm Grid Assembly, 3 Grid, Moly, 130 FP, 8 cm Hole
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12 cm Grid Assembly, 3 Grid, Moly, 130 FP, 8 cm Hole, with Mount Hardware
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12 cm Grid Assembly, 3 Grid, Moly, 25 cm FP, Convergent
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12 cm Grid Assembly, 3 Grid, Moly, 25 cm FP, Divergent
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12 cm Grid Assembly, 3 Grid, Moly, 46 cm FP, Convergent
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12 cm Grid Assembly, 3 Grid, Moly, 46 cm FP, Divergent
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12 cm Grid Assembly, 3 Grid, Moly, 46 cm FP, Divergent, with Mount Hardware
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12 cm Grid Assembly, 3 Grid, Pyrolytic Graphite
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12 cm Grid Assembly, 3 Grid, Pyrolytic Graphite for RF
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12 cm Grid Assembly, 3 Grid, Pyrolytic Graphite with Mount Hardware
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12 cm Grid Assembly, 3 Grid, Titanium, 130 cm FP, Convergent
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12 cm Grid Mount Assembly Hardware
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Alignment Jig, 16 cm, 12 cm Grids, Lexan
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I-BEAM RFS/RFN 600mA/1500V Beam
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I-BEAM RFS/RFN 600mA/1500V BEAM and IBOX 104
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Auto controller for matching network, with cable
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Match Network and Controller for 12 RF Source EXTENSION MOUNT
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Match Network and Controller for 12 RF Source FLANGE MOUNT
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Match Network and Controller for 12 RF Source INTERNAL MOUNT
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Matching Network for 12 cm RF Ion Source EXTENSION MOUNT
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Matching Network for 12 cm RF Ion Source FLANGE MOUNT
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Matching Network for 12 cm RF Ion Source INTERNAL MOUNT
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Cable Kit for IBEAM 703, Includes: 2 RF Coaxial, 1 RFN 5 Wire, 1 Source 4 Wire, 18-Foot Cables, and 6-Foot PTII Controller Cable
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Cable, 4 Wire HV type, IBEAM to RF Source, 18 ft
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Cable, 5 Wire HV Type, IBEAM to RFN Match, 18 ft
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Cable, RF Power N-N type, IBEAM to Match Network, 18 ft
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Cable, RF Power N-N Type, IBEAM to RFN Match, 18 ft
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RFN Assembly
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RFN Flange with Match Network ITI Style, 2.75 inch, CF
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RFN Flange with Match Network ITI Style, 4.5 inch, CF
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RFN Flange with Match Network ITI style, 6 inch, CF
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Refurbish Customer Supplied RFN
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I-Beam RFN Power Supply for Stand Alone RFN
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Gas Isolator Assembly RFN
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RFN Alumina Backplate
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RFN Discharge Chamber
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RFN Keeper
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RFN, Antenna Lead Assembly
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RFN, Collector Lead Assembly
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RFN, Keeper Lead Assembly
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Spare Part Set – RFN Assembly
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12 cm Interface Kit, 14″ CF Flange Mount
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12 cm Interface Kit, Internal Mount, 14″ CF with RF, Gas/Electric and Water
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12 cm Interface Kit, Internal Mount, 18″ Leads 2.75″ CF Flanges – Gas/Electric, RF, and Water
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12 cm Interface Kit, ISO 320 Flange Mount
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12 cm Grid Mount Hardware Kit
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12 cm Quartz Discharge Chamber Assembly
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12 cm RF Antenna Assembly
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ELECTRIC LEAD, ACCEL, 18 inch, Shielded, #16 D Female to Lug
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ELECTRIC LEAD, BEAM, 18 inch, Shielded, #12 D Female to Lug
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Electrical Tab, Accel, RF Shroud
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Electrical Tab, Beam, RF Shroud
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FEEDTHROUGH, DC Bias & Gas, 2.75″ CF, 18L
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FEEDTHROUGH, DC Bias & Gas, 2.75″ CF, 1L
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FEEDTHROUGH, RF, 2.75″ CF, 18″ L
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Gas Isolator Assembly, RFIS, Inlet Tube 0.687 inch, Outlet Tube 1.0 inch
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Gas Isolator Assembly, RFIS, Inlet Tube 0.687 inch, Outlet Tube 1.5 inch
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Gas Isolator Assembly, RFIS, Inlet Tube 1.0 inch Bushing, Outlet Tube 2.0 inch
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RF Antenna Insulator
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Spare Part Set – 12 cm Grid Assembly
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