Description
The 12 cm RF ion beam source is great value as a deposition source in smaller systems or as an assist source for evaporative tools. Providing additional service as a pre-clean source for substrates, the 12cm source is one of the most versatile options available. As with all RF ion sources from Plasma Process Group, the 12cm can run on almost any process gas, including inert species such as argon and xenon, and reactive species like O2, N2, CH3, and many more. Capable of outputs as high as 400mA at 1500eV, this source is also stable at more common assist conditions like 200mA at 250V. The 12cm source provides a 12cm ion beam that is shaped by the choice of grids. Available with molybdenum convergent or divergent grids with several possible focal points, or collimated graphite, the 12cm beam can be optimized for almost any process.
