12 cm RF Ion Beam Source

A round cylinder houses the ion beam source and multi aperture grid assembly produces the ion beam.

This mid sized 12cm RF ion beam source is well suited for small systems.  It is a versatile source that offers solutions ranging from pre-cleaning through sputter deposition. This source will convert an evaporative system into an ion assisted deposition machine thereby creating higher quality coatings.


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Product and Components

12RF08 – 12 cm RF source

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