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Part No. 16RF HC Category: Tag:

16 cm RF Ion Beam Source – High Current

Our 16cm RF high current (HC) ion beam source is an industry workhorse. When paired with our IBEAM power supply (and its internal generator) it has output capacity 800mA. This dynamic and versatile source can satisfy a huge array of needs in deposition and large-scale Ion assist processes. Available with standard molybdenum, collimated graphite, or titanium grids, this source can be used in almost any type of contamination-sensitive ion beam process. The source provides a 16cm ion beam which is then shaped by the choice of grids. Convergent, divergent, collimated, and even multi-focal point grids are available with this source.

Additional information

Weight 3.171 kg
Dimensions 298 × 140 mm
Beam Current

100-1000 mA

Beam Voltage

100-1500 eV

Grid Material

Molybdenum, Graphite, Titanium

Water Cooling

Antenna and shroud at 6 l/min

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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