Description
Our 16cm RF high current (HC) ion beam source is an industry workhorse. When paired with our IBEAM power supply (and its internal generator) it has output capacity 800mA. This dynamic and versatile source can satisfy a huge array of needs in deposition and large-scale Ion assist processes. Available with standard molybdenum, collimated graphite, or titanium grids, this source can be used in almost any type of contamination-sensitive ion beam process. The source provides a 16cm ion beam which is then shaped by the choice of grids. Convergent, divergent, collimated, and even multi-focal point grids are available with this source.