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12 cm Interface Kit, ISO 320 Flange Mount
This kit includes feedthroughs necessary to interface a 12 cm ion beam source to a system as a flange mount. The interface kit consists of a 320 ISO style flange and high voltage cover. Additional feedthroughs include gas/electric (2.75″ CF), RF (2.75″ CF), and water (1″ o-ring). Source and matching network are sold separately.
Additional information
| Weight | 13.59 kg |
|---|---|
| Dimensions | 356 × 356 × 356 mm |
| Material | Stainless Steel, Alumina, copper tubing, teflon |
| Includes | 12cm flange (Iso320) (505534A), 2.75 inches CF RFP Feedthrough 1.63 inches L (505437A), 2.75 inches CF DC Bias & Gas feedthrough (505544A), 1 inches water assembly feedthrough (505182A), 9 inches leads, fasteners, RF covers |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
