6×22 or 6×30 cm Linear RF Sources

Our Linear RF sources are useful for in-line applications such as roll-to-roll or web coaters. The 6x30cm source can be equipped with either 6x30cm collimated graphite grids or 6x22cm shaped molybdenum grids.  This allows for greater process flexibility with a single ion source. Additionally, the gas, RF antenna cooling water, and DC connections have been placed on the side of the ion source instead of the rear giving the ion source more placement flexibility inside the chamber. We also offer a standard 6x22cm ion source with most of the same benefits, but just uses 6x22cm molybdenum grids. As with all RF ion sources, these can be run with both inert and some reactive gases. With a maximum of 500mA and 1500V, these linear ion sources can handle both high-rate, high-throughput and precision assist or etch operations.