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12 cm Grid Assembly, 3 Grid, Pyrolytic Graphite with Mount Hardware
This is a 12 cm grid assembly that consists of 3 grids which are collimated. The beam shape is ideal for etching or sputtering. The grid material is pyrolytic graphite. Compatible with legacy sources. The assembly also includes mounting hardware for a 12 cm RF source. Does not include discharge chamber.
Additional information
| Weight | 0.453 kg |
|---|---|
| Dimensions | 181 × 181 × 32 mm |
| Material | Pyrolytic graphite, Stainless Steel, Alumina |
| Beam size (cm) | 12cm |
| Max Beam I (mA) | 400mA |
| Max Beam V (V) | 1500v |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
