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Part No. 504822A Category: Tags: ,

16 cm Grid Assembly, 3 Grid, Graphite

This is a 16 cm grid assembly that consists of 3 grids which are collimated. The beam shape is ideal for etching or sputtering applications. The grid material is pyrolytic graphite. The mount hardware is sold separately. This grid set is designed for replacement of a standard Molybdenum grid set in a 16 cm ion beam source. For use in a standard 16 cm ion beam source, special spacing and grid spring tabs are required during assembly and mounting.

Additional information

Weight 0.453 kg
Dimensions 203 × 203 × 25 mm
Material

Pyrolytic graphite, Stainless Steel, Alumina

Beam size (cm)

16cm

Max Beam I (mA)

600mA

Max Beam V (V)

1500V

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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