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Part No. 507090A Category: Tags: ,

23 cm Grid Assembly, 3 Grid, Moly, 66 cm FP, Divergent

This 23 cm grid assembly consists of 3 grids that are shaped with a 66 cm divergent focal point (FP). These grids are optimized for lower RF power consumption and are ideal for assist or etching applications. The grid material is molybdenum.

Additional information

Weight 0.6 kg
Dimensions 312 × 25 mm
Material

Molybdenum, Stainless Steel, Alumina

Beam size (cm)

16cm

Max Beam I (mA)

1500mA

Max Beam V (V)

1500v

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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