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Part No. 507186A Category: Tags: , ,

6 cm Grid Assembly, 2 Grid, Pyrolytic Graphite, Collimated RF

This 6 cm grid assembly consists of 2 grids that are pyrolytic graphite. The grid assembly will produce a collimated beam ideal for etching. The assembly does not include mounting hardware and will work with legacy sources.

Additional information

Weight 0.275 kg
Dimensions 102 × 102 × 31 mm
Material

Pyrolytic graphite, Stainless Steel, Alumina

Beam size (cm)

6cm

Max Beam I (mA)

200mA

Max Beam V (V)

1500v

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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