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6 cm Interface Kit, Internal Mount, 18″ Leads, 2.75″ CF Flanges – Gas/Electric and RF
This kit includes feedthroughs necessary to interface a 6 cm RF ion beam source to a system as an internal mount. The interface kit includes two 2.75″ CF style flanges. One for the gas and DC bias and the other feedthrough for the RF power and antenna water cooling. Also includes high voltage covers. Electrical leads are about 18 inches in length. Source and matching network are sold separately.
Additional information
| Weight | 6.795 kg |
|---|---|
| Dimensions | 229 × 432 × 711 mm |
| Material | Stainless steel, Nickel wire, alumina beads, ceramic and Kovar end seals |
| Includes | 2.75 inches DC Bias & Gas Feedthrough (505108A), RF Feedthrough 2.75 inches CF flange x 18 inches L (505106A), 18-inch leads, fasteners, RF covers and poly tubing |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
