6cm RF Ion Beam Source

Our smallest ion beam source, the 6cm RF can provide all the benefits of radio frequency ion source technology in a smaller, more compact, and less expensive form. With a maximum beam current of 200mA at 1500V, the 6cm source is ideal for research and smaller production systems.

This source also finds a home in etch and ion beam figuring (IBF) systems with its highly divergent or highly convergent grid options. The body of this source is not water-cooled, thus requiring only two feedthroughs, RF power and DC Bias/Gas. Designed around the flexibility of internal mounting, the 6cm source is also capable of being mounted directly to a flange for process flexibility. As with all RF sources, the 6cm source can be run with both inert and reactive gases, making the 6cm ideal for any ion beam process.