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12 cm Grid Assembly, 3 Grid, Pyrolytic Graphite
This 12 cm Grid assembly consists of 3 grids that are collimated. Material is pyrolytic graphite. The beam shape is ideal for etching or sputtering. These grids are designed to adapt to our standard 12 cm RF ion beam source. These grids are compatible with legacy sources too. Does not include custom mounting hardware.
Additional information
| Weight | 0.272 kg |
|---|---|
| Dimensions | 181 × 181 × 32 mm |
| Material | Molybdenum, Stainless Steel, Alumina |
| Beam size (cm) | 12cm |
| Max Beam I (mA) | 400mA |
| Max Beam V (V) | 1500v |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
