This is an image of a 16cm graphite 3-grid assembly with mount hardware.
This is an image of a 16cm graphite 3-grid assembly with mount hardware.
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Part No. 505093A Category: Tags: ,

16 cm Grid Assembly, 3 Grid, Graphite, Standard, with Mount Hardware

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This package includes a 16 cm graphite grid assembly with mount hardware. The beam shape is ideal for sputtering or etching. The 16 cm grid assembly is p/n 504822A. The mounting hardware includes: retainer plate, mount plate with cover, discharge chamber retainer ring and all fastening hardware. Will work with legacy 16cm sources. Discharge chamber is sold separately.

Additional information

Weight 2.265 kg
Dimensions 290 × 90 mm
Material

Pyrolytic graphite, Stainless Steel, Alumina
Beam Size

16cm
Max Beam I (mA)

600mA
Max Beam V (V)

1500V

The Latest News from Plasma Process Group

 

Welcome to our newsfeed where you will find the latest news.  In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry.  Other articles may include the release of new products, videos, and tech notes.  When we attend a trade show, we will let you know when and where so that you can stop by our booth.

 

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