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6 cm Interface Kit, 10″ CF Flange Mount
This kit includes a 10 inch CF flange necessary to interface a 6 cm RF ion beam source to a system as a flange mount. The interface kit includes two smaller flanges. One for the gas and DC bias and the other feedthrough for the RF power and antenna water cooling. Also includes high voltage covers and standoffs for a matching network. Source and matching network are sold separately.
Additional information
| Weight | 11.325 kg |
|---|---|
| Dimensions | 254 × 254 × 660 mm |
| Material | Stainless steel, Nickel wire, alumina beads, ceramic and Kovar end seals |
| Includes | 10 inch CF flange (505867A), 213 CF flange x 1L DC Bias and Gas Feedthrough (505898A), 2.75 inch CF x 1.88 inch L RFP Feedthrough (505900A), 7-inch beaded leads, poly tubing, and all fasteners, gaskets, and brackets required. |
The Latest News from Plasma Process Group
Welcome to our newsfeed where you will find the latest news. In our newsletter you will find a Tech Tip where we provide an in-depth look at common problems for all customers and offer up solutions to help industry. Other articles may include the release of new products, videos, and tech notes. When we attend a trade show, we will let you know when and where so that you can stop by our booth.
Subscribe to our newsletter by sending us an email to stay current with the latest news!
