The 16 cm RF ion beam source is well suited and designed for demanding production environments. This is our industry standard for thin film deposition. It has the many grid and vacuum interface options. It works well in batch coating systems.
16 cm RF Ion Beam Source
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Workhorse
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16 cm Grid Assembly, 3 Grid, Graphite
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16 cm Grid Assembly, 3 Grid, Graphite, Ellipse 120×50
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16 cm Grid Assembly, 3 Grid, Graphite, Standard, with Mount Hardware
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16 cm Grid Assembly, 3 Grid, Moly, 130 cm FP, Divergent
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16 cm Grid Assembly, 3 Grid, Moly, 2 FP 104/72, 065/035 Spacing, SAD 015 Thick
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16 cm Grid Assembly, 3 Grid, Moly, 2 FP 104/72, 065/035 Spacing, SAD 020 Thick
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16 cm Grid Assembly, 3 Grid, Moly, 25 cm FP, Divergent
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16 cm Grid Assembly, 3 Grid, Moly, 3 FP 104/72/40 cm, 065/035 Spacing, S 015 Thick
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16 cm grid assembly, 3 grid, moly, 3 FP 104/72/40 cm, 065/035 spacing, S 015 thick, with mount hardware
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16 cm Grid Assembly, 3 Grid, Moly, 3 FP 104/72/40 cm, 065/035 Spacing, S 020 Thick
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16 cm grid assembly, 3 grid, moly, 3 FP 104/72/40 cm, with mount hardware
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16 cm Grid Assembly, 3 Grid, Moly, 33 cm FP, Divergent
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16 cm Grid Assembly, 3 Grid, Moly, 66 cm FP, Convergent
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16 cm Grid Assembly, 3 Grid, Moly, 66 cm FP, Convergent, with Mount Hardware
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16 cm Grid Assembly, 3 Grid, Moly, 66 cm FP, Divergent
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16 cm Grid Assembly, 3 Grid, Moly, 66 cm FP, Divergent, with Mount Hardware
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16 cm Grid Assembly, 3 Grid, Titanium, 3 FP 104/72/40 cm, 065/035 Spacing
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16 cm Grid Assembly, 3 Grid, Titanium, 66 cm FP, Convergent
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16 cm Grid Mount Assembly Hardware
$4,125.00 -
Alignment Jig, 16 cm, 12 cm Grids, Lexan
$330.00
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I-BEAM RFS/RFN 1000mA/1500V Beam and IBOX 104
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I-BEAM RFS/RFN 600mA/1500V Beam
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I-BEAM RFS/RFN 600mA/1500V BEAM and IBOX 104
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I-BEAM RFS/RFN 800mA/1500V Beam
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I-BEAM RFS/RFN 800mA/1500V BEAM and IBOX 104
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I-BEAM RF/RFN 1000mA/1500V Beam for 1 kW RF Generator and IBOX104
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I-BEAM RF/RFN 1500mA/1250V BEAM for 1 kW RF Generator and IBOX104
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Auto controller for matching network, with cable
$2,100.00 -
Match Network and Controller for 16 RF Source EXTENSION MOUNT
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Match Network and Controller for 16 RF Source FLANGE MOUNT
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Match Network and Controller for 16 RF Source INTERNAL MOUNT
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Matching Network for 16 cm RF Ion Source EXTENSION MOUNT
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Matching Network for 16 cm RF Ion Source FLANGE MOUNT
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Matching Network for 16 cm RF Ion Source INTERNAL MOUNT
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Matching Network for High Current HC 16 cm RF Ion Source EXTENSION MOUNT
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Matching Network for High Current HC 16 cm RF Ion Source FLANGE MOUNT
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Matching Network for High Current HC 16 cm RF Ion Source INTERNAL MOUNT
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RF Generator, 1000 W, for IBEAM Supply
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Cable Kit for IBEAM 703, Includes: 2 RF Coaxial, 1 RFN 5 Wire, 1 Source 4 Wire, 18-Foot Cables, and 6-Foot PTII Controller Cable
$2,075.00 -
Cable Kit for IBEAM w/IBOX and w/1 KW External Generator
$2,225.00 -
Cable, 4 Wire HV type, IBEAM to RF Source, 18 ft
$810.00 -
Cable, 5 Wire HV Type, IBEAM to RFN Match, 18 ft
$600.00 -
Cable, RF Power N-N type, IBEAM to Match Network, 18 ft
$465.00 -
Cable, RF Power N-N Type, IBEAM to RFN Match, 18 ft
$465.00
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RFN Assembly
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RFN Flange with Match Network ITI Style, 2.75 inch, CF
$4,985.00 -
RFN Flange with Match Network ITI Style, 4.5 inch, CF
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RFN Flange with Match Network ITI style, 6 inch, CF
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Refurbish Customer Supplied RFN
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I-Beam RFN Power Supply for Stand Alone RFN
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Gas Isolator Assembly RFN
$1,075.00 -
RFN Alumina Backplate
$374.00 -
RFN Discharge Chamber
$863.00 -
RFN Keeper
$85.00 -
RFN, Antenna Lead Assembly
$710.00 -
RFN, Collector Lead Assembly
$490.00 -
RFN, Keeper Lead Assembly
$490.00 -
Spare Part Set – RFN Assembly
$930.00
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16 cm Quartz Discharge Chamber Assembly
$1,610.00 -
16 cm RF Antenna Assembly
$710.00 -
ELECTRIC LEAD, ACCEL, 11 inch, Beaded, #16 D Female to Lug
$310.00 -
ELECTRIC LEAD, ACCEL, 18 inch, Shielded, #16 D Female to Lug
$355.00 -
ELECTRIC LEAD, BEAM, 11 inch, Beaded, #12 D Female to Lug
$310.00 -
ELECTRIC LEAD, BEAM, 18 inch, Shielded, #12 D Female to Lug
$355.00 -
Electrical Tab, Accel, RF Shroud
$85.00 -
Electrical Tab, Beam, RF Shroud
$85.00 -
FEEDTHROUGH, DC Bias & Gas, 2.75″ CF, 18L
$1,500.00 -
FEEDTHROUGH, DC Bias & Gas, 2.75″ CF, 1L
$1,500.00 -
FEEDTHROUGH, RF, 2.75″ CF, 18″ L
$2,130.00 -
Gas Isolator Assembly, RFIS, Inlet Tube 0.687 inch, Outlet Tube 1.0 inch
$1,075.00 -
Gas Isolator Assembly, RFIS, Inlet Tube 0.687 inch, Outlet Tube 1.5 inch
$1,075.00 -
Gas Isolator Assembly, RFIS, Inlet Tube 1.0 inch Bushing, Outlet Tube 2.0 inch
$1,075.00 -
RF Antenna Insulator
$259.00 -
Spare Part Set – 16 cm Grid Assembly
$930.00
