RF Neutralizers

The RF neutralizer is placed downstream from the source.  There, it emits electrons to balance the number of positive ions which leave the source. The RFN operates in a similar fashion to the source.  It requires an inert process gas, has an RF antenna and its own matching network. Please refer to its manual for a detailed description of its operation and additional information.

The RFN needs to be placed so that its electrons can couple (or “see”) the ion beam. It is very important that these electrons have a close (about 150 mm), unobstructed path to the beam to ensure stable, noise free operation. The RF neutralizer should also be located away from strong magnetic fields. A common challenge will be to protect the RFN from process material that can coat its keeper – but allow for electrons to couple.