12cm RF Ion Beam Source | Plasma Process Group

12 cm RF Ion Beam Source

A round cylinder houses the ion beam source and multi aperture grid assembly produces the ion beam.

This mid sized 12cm RF ion beam source is well suited for small systems. It is a versatile source that offers solutions ranging from pre-cleaning through sputter deposition. This source will convert an evaporative system into an ion assisted deposition machine thereby creating higher quality coatings.

Versatile

Product and Components

Source

12RF08 – 12 cm RF source

Grids

504149C – molybdenum 3 grid with 130 cm focal point divergent

504391A – molybdenum 3 grid with 130 cm focal point convergent 8cm pattern

505790A – titanium 3 grid with 130 cm focal point convergent

504593A – molybdenum 3 grid with 46 cm focal point divergent

505992A – molybdenum 3 grid with 46 cm focal point convergent

504660A – molybdenum 3 grid with 25 cm focal point convergent

505274A – graphite 3 grid collimated

Power Supplies

Our power supplies are CE certified.

IBEAM 703-1 series with RF power, DC bias, control and RFN operation

504552B1 – Matching network for 12 cm flange mount source

504552B2 – Matching network for 12 cm extension mount source

504552B3 – Matching network for 12 cm internal mount source

505914B1 – Matching network, controller, and cable for 12 cm flange mount source

505914B2 – Matching network, controller, and cable for 12 cm extension mount source

505914B3 – Matching network, controller, and cable for 12 cm internal mount source

505752A – IBEAM 703 cable kit with beam, RFN and RF cables

IBOX-104 – adaptor for connections to an Ion Tech style configuration (legacy equipment)

Neutralizer

Interface Kits

Parts

Contact Us

Call 1-970-663-6988 Email [email protected]