12cm RF Ion Beam Source | Ion Beam Systems

12 cm RF Ion Beam Source

This mid sized ion source is well suited for small systems. It is a versatile source that offers solutions ranging from pre-cleaning through sputter deposition. This source will convert an evaporative system into an ion assisted deposition machine thereby creating higher quality coatings.

Versatile

Product and Components

Source

12RF08 – 12 cm RF source

Grids

504149C – molybdenum 3 grid with 130 cm focal point divergent

504391A – molybdenum 3 grid with 130 cm focal point convergent 8cm pattern

505790A – titanium 3 grid with 130 cm focal point convergent

504593A – molybdenum 3 grid with 46 cm focal point divergent

505992A – molybdenum 3 grid with 46 cm focal point convergent

504660A – molybdenum 3 grid with 25 cm focal point convergent

505274A – graphite 3 grid collimated

Power Supplies

Our power supplies are CE certified.

IBEAM 703-1 series with RF power, DC bias, control and RFN operation

504552B1 – Matching network for 12 cm flange mount source

504552B2 – Matching network for 12 cm extension mount source

504552B3 – Matching network for 12 cm internal mount source

505914B1 – Matching network, controller, and cable for 12 cm flange mount source

505914B2 – Matching network, controller, and cable for 12 cm extension mount source

505914B3 – Matching network, controller, and cable for 12 cm internal mount source

505752A – IBEAM 703 cable kit with beam, RFN and RF cables

IBOX-104 – adaptor for connections to an Ion Tech style configuration (legacy equipment)

Neutralizer

Interface Kits

Parts

Contact Us for a Quote

Call 1-970-663-6988 Email [email protected]