6 cm RF Ion Beam Source
Our smallest RF source, the 6 cm source can provide all the benefits of radio frequency ion source technology in a smaller, more compact, and less expensive form. With a maximum beam current of 200mA at 1500V, the 6cm source is ideal for smaller production systems. This source also finds a home in etch and ion beam figuring systems with its divergent or convergent grid options. The body of this source is not water-cooled. This reduces the number of vacuum feedthroughs and cost. Designed around the flexibility of internal mounting, the 6cm source is also capable of being mounted directly to a flange for process flexibility. The 6 cm can be run with inert gases, making the 6 cm ideal for any ion beam process.
