Ion beam grids, sometimes called ion optics, are installed onto the ion source to create and shape the ion beam emitted from the source.

Ion beam sources can be used for sputtering material or etch.  The ion beam source works when a discharge, or plasma, is created inside the source.  Ions inside the source are contained using a discharge chamber.  The plasma is created using an RF antenna attached to a matching network and generator.  The ion beam grids or grid assembly is connected to extract the ion beam and it functions to direct the beam towards the target or substrate.

The ion beam source is operated using our IBEAM power supply.  This power supply has a beam module to control the ion energy (voltage) and dose (beam current).  The accelerator module controls the ion trajectories.  The RF module establishes the plasma and the RFN module connects to the neutralizer.


16 cm 3 focal point grid assembly for an ion beam source.

January 2024 Newsletter

This month we are doing an in-depth look at common grid set issues that can occur during operation and refurbishments. We also discuss the general care of your Moly grids.

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October 2020 Newsletter

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April 21 COVID Update

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